Apreo SEM

Apreo C Low-Vacuum SEM (ThermoScientific) Room 105 MB

The Apreo C Low-Vac SEM is a versatile, high-performance instrument with both low vacuum and high vacuum modes to accommodate a wide range of samples. Characterization of conductive and non-conductive samples with SE and BSE imaging is possible in both modes of operation. Sample preparation is minimized due to the low vacuum capability to reduce charging of non-conductive and/or hydrated specimens. In addition, the field emission gun (FEG) system allows for the high-resolution imaging that is expected of a high vacuum field-emission SEM. The Apreois also equipped with an energy dispersive spectrometer (XEDS) for chemical analysis and an EBSD system for crystallographic or diffraction analysis.

You can see more specifications of the system below

ThermoScientific Apreo C Low Vac system Surface of uncoated fruit fly, imaged at 2 kV

Electron optics
· High-resolution field emission SEM column with:
- High-stability Schottky field emission gun to provide stable high-resolution analytical currents
- Electrostatic final lens: a field-free magnetic objective lens
- 60°objective lens geometry: allows tilting larger samples
· Automated heated apertures to ensure cleanliness and touch free aperture changes
· Through-the-lens differential pumping for low vacuum reduces beam skirting for the most accurate analysis and highest resolution
· Beam deceleration with stage bias from -4000 V to +600 V

Electron beam resolution
· High-vacuum imaging, optimum WD, field-free mode
- 1.0 nm @ 15 kV
- 1.3 nm @ 1 kV
· Low-vacuum imaging, optimum WD, field-free mode
- 1.2 nm @ 15 kV
- 1.8 nm @ 3 kV

Electron beam parameter space
· Beam current range: 1 pA to 400 nA
· Accelerating voltage range: 200 V – 30 kV
· Landing energy range: 20 eV – 30 keV
· Max. Horizontal Field Width: 3.0 mm at 10 mm WD (corresponds to 29x minimum magnification).

Chamber
· Inside width: 340 mm
· Analytical working distance: 10 mm
· Ports: 12
· EDS take-off angle: 35°
· Three simultaneous EDS detectors possible, two at 180°
· Coplanar EDS/EBSD in the tilt axis of the stage

Stage
· Eucentric goniometer stage, 5-axes motorized
· 110 mm in both X and Y
· Repeatability < 3.0 µm (@ 0˚ tilt)
· Motorized Z down to 65 mm
· 360° rotation
· Tilt: -15˚/ +90˚
·  Max. Sample height: Clearance 85 mm to eucentric point
· Max. Sample weight: 500g in any stage position (up to 2 kg at 0˚ tilt)
· Max. Sample size: 122 mm diameter with full X,Y & rotation (larger samples possible with limited stage travel or rotation)

Detectors
Apreo detects up to four signals simultaneously from any combination of the available detectors or detector segments:
· Trinity Detection System (in-lens and in-column)
- T1 segmented lower in-lens detector
- T2 upper in-lens detector
· ETD – Everhart-Thornley SE detector
· DBS – Retractable segmented under-the-lens BSED
· Low-vacuum SE detector
· DBS-GAD – Lens-mounted gaseous analytical BSED
· IR-CCD
· Nav-Cam+TM chamber-mounted camera

Vacuum system
· Complete oil-free vacuum system
· 1 × 220 l/s TMP
· 1 × PVP-scroll
· 2 × IGP
· Chamber vacuum (high vacuum) < 6.3 × 10-6 mbar (after 72 hours pumping)
· Evacuation time: ≤ 3.5 minute
· Optional low-vacuum mode
· 10 to 500 Pa chamber pressure

System Control
· 64-bit GUI with Windows 7, keyboard, optical mouse
· 24-inch LCD display, WUXGA 1920 × 1200 (second monitor)
· Customizable graphical user interface, with up to 4 simultaneously active views
· Image registration
· Navigation montage
· Image analysis software
· Undo / Redo functionality
· User guidance for basic operations / applications
· Manual user interface (knob board)

Image processor
· Dwell time range from 25 ns – 25 ms/pixel
· Up to 6144 × 4096 pixels
· File type: TIFF (8, 16, 24 bit), JPEG or BMP
· Single-frame or 4-view image display
· SmartSCAN (256-frame average or integration, line integration and averaging, interlaced scanning)
· DCFI (Drift Compensated Frame Integration)

Accessories
· Sample / chamber cleaning: FEI Integrated Plasma Cleaner
· Analysis: EDAX Silicon-drift XEDS, TSL EBSD detector and OIM system, & Gatan Cathodoluminescence detector