ESEM FEI XL30 (Room 101MB) 

The XL30 ESEM is a versatile, high-performance instrument with three modes (high vacuum, low vacuum and ESEM) to accommodate the widest range of samples of any SEM system. Characterization of conductive and non-conductive samples with SE and BSE imaging is possible in every mode of operation. Sample preparation is minimized due to the low vacuum and ESEM capability to reduce charging of non-conductive and/or hydrated specimens. In addition, the field emission gun (FEG) system allows for the high-resolution imaging that is expected of a high vacuum field-emission SEM. The ESEM is also equipped with an energy dispersive spectrometer (XEDS) for chemical analysis.

You can see more specifications of the system below



FESEM column (Schottky FEG)

Accelerating voltage range: 100 V – 30 kV

Probe current range: 0.7 pA to 22 nA

Electron beam resolution at optimum WD

2 nm at 30 kV

5 nm at 1 kV

Operating pressure: High Vacuum to 20 mBar

4-axis motorized stage

Manual tilt: -15˚ to 75˚

Z travel to 25 mm WD

X, Y: 50 x 50 mm


Everhart-Thornley SE detector (ETD)

Gaseous-secondary electron detector (GSED)

IR camera for viewing sample/column

Manually retractable low-voltage, high-contrast solid-state electron detector (BSD)

Cathodoluminescence detector (CL)


Windows NT OS

FEI Mcntrl UI


EBL–Nabity Nanometer Pattern Generation System (NPGS)