Verios G4 UC

ThermoScientific Verios G4 UC SEM

The VeriosTM is the second generation of ThermoScientific’s leading XHR SEM family, offering: 
Best-in-class ElstarTM Schottky Monochromated (UC) FESEM technology 
Sub-nanometer resolution from 1 to 30 keV 
UC gun (monochromator), ConstantPowerTM lens technology and electrostatic scanning for accurate and stable imaging
Consistent measurement results with the ability to calibrate to a NIST certified standard at high magnification
Beam landing energies as low as 20 eV with very high resolution for true surface characterization High-sensitivity, in-column & below-the-lens detectors
Very high precision & stability, piezo-driven 100x100 mm stage in a large analytical chamber



Specifications  
Elstar XHR Immersion lens FESEM column
Elstar electron gun with:
– Schottky thermal field emitter
– Hot-swap capability
– UC technology (monochromator)
60˚ dual objective lens with pole piece protection
Heated objective apertures
Beam deceleration with stage bias from -50V to -4kV
Integrated Fast Beam Blanker
Electron beam resolution (@ optimum working distance)
0.6 nm at 30 kV (STEM)
0.6 nm at 15 kV 0.6 nm at 2 kV 0.7 nm at 1 kV 1.0 nm at 500 V (ICD) 1.2 nm at 200 V (ICD) Maximum horizontal field width
>2.0 mm at WD 4mm
Landing energy range
20 eV – 30 keV
Probe current
0.8 pA up to 100 nA
Detectors
Elstar in-lens SE detector (TLD-SE)
Elstar in-lens BSE detector (TLD-BSE)
Elstar in-column SE detector (ICD)

Elstar in-column BSE detector (MD)
Everhart-Thornley SE detector (ETD)
IR camera for viewing sample/column
Chamber mounted Nav-Cam
Retractable STEM 3+ detector with three concentric, ring-shaped sections:
– Inner section - for bright-field imaging
– Intermediate section - 4 annular rings for tunable dark-field imaging and compositional contrast
– Outer section - six angular segments, for high-angle, DF imaging
Retractable low-voltage, high-contrast, solid-state backscatter detector (DBS)
Integrated beam current measurement
Ultra-high precision 5-axis piezo-motorized stage
X, Y = 100 mm
Z ≥ 20 mm
T = -10˚ to +60˚
R = n x 360˚ stroke
X, Y repeatability 0.5 µm
X, Y accuracy <1.5 µm 85% tolerance interval Mechanically tilt eucentric stage with < 5 µm image motion when tilting 0˚ to 52˚ Compucentric rotation and tilt Sample size allowance Max size: 100 mm diameter with full rotation Max sample thickness: 27.8 mm including sample holder Max weight: 200 g (incl. holder) Image processing Dwell time range from 0.025 to 25000 µs/pixel Up to 6144 x 4096 pixels File types: TIFF (8, 16, 24-bit), BMP or JPEG SmartSCAN (256 frame average of integration, line integration and averaging, interlaced scanning) and DCFI (Drift Compensated Frame Integration)

Accessories
ThermoScientific Pathfinder XEDS System
UltraDry Premium EDS detector
Active area of 60 mmand 129 eV energy resolution at Mn k-alpha
Norvar window with proprietary evacuated tube design for detection sensitivity to Be
Analyzer electronics with up to 1M X-ray input cps and 300K X-ray output cps
Motorized slide for software controllable insertion/retraction
Acoustic enclosure for the pre-vacuum pump
Integrated plasma cleaner